Abstract
Peripheral magnetic field lines extending from the plasma source into the diffusion chamber are found to separate two regions of Maxwellian electron energy probability functions: the central, ion-beam containing region with an electron temperature of 5 eV, and region near the chamber walls with electrons at 3 eV. Along the peripheral field lines a bi-Maxwellian population with a hot tail at 9 eV is shown to both originate from electrons in the source traveling downstream across the double layer and correspond to a local maximum in ion and electron densities.
Original language | English |
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Article number | 191503 |
Journal | Applied Physics Letters |
Volume | 94 |
Issue number | 19 |
DOIs | |
Publication status | Published - 2009 |