Trap-Limited Migration of Vacancy-Type Defects in 7.5 keV H--Implanted Si

Prakash Deenapanray

    Research output: Contribution to journalArticlepeer-review

    Original languageEnglish
    Pages (from-to)1577-1579
    JournalApplied Physics Letters
    Volume80
    Issue number9
    Publication statusPublished - 2002

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