Two modes of laser lithography fabrication of three-dimensional submicrometer structures

I. I. Shishkin; K. B. Samusev; M. V. Rybin; M. F. Limonov; R. V. Kiyan; B. N. Chichkov; Yu S. Kivshar’; P. A. Belov

doi:10.1134/S1063783414110262

Two modes of laser lithography fabrication of three-dimensional submicrometer structures

I. I. Shishkin, K. B. Samusev, M. V. Rybin^*, M. F. Limonov, R. V. Kiyan, B. N. Chichkov, Yu S. Kivshar’, P. A. Belov

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

The modes of laser lithography fabrication of three-dimensional submicrometer structures have been studied. The method is based on the effect of threshold two-photon polymerization of a photosensitive material at the laser beam focus. To determine the lithograph workspace in the coordinates “laser power-speed of the sample displacement with respect to the laser focus,” a series of photonic crystals with the woodpile structure is prepared. Two methods for fabricating three-dimensional structures, i.e., raster scanning and vector graphics (or the vector method) are analyzed in detail. The advantages of the vector method for fabricating periodic structures are demonstrated using crystals of inverted yablonovite as an example. The prepared samples are studied by scanning electron microscopy.

Original language	English
Pages (from-to)	2166-2172
Number of pages	7
Journal	Physics of the Solid State
Volume	56
Issue number	11
DOIs	https://doi.org/10.1134/S1063783414110262
Publication status	Published - 2014

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title = "Two modes of laser lithography fabrication of three-dimensional submicrometer structures",

abstract = "The modes of laser lithography fabrication of three-dimensional submicrometer structures have been studied. The method is based on the effect of threshold two-photon polymerization of a photosensitive material at the laser beam focus. To determine the lithograph workspace in the coordinates “laser power-speed of the sample displacement with respect to the laser focus,” a series of photonic crystals with the woodpile structure is prepared. Two methods for fabricating three-dimensional structures, i.e., raster scanning and vector graphics (or the vector method) are analyzed in detail. The advantages of the vector method for fabricating periodic structures are demonstrated using crystals of inverted yablonovite as an example. The prepared samples are studied by scanning electron microscopy.",

author = "Shishkin, {I. I.} and Samusev, {K. B.} and Rybin, {M. V.} and Limonov, {M. F.} and Kiyan, {R. V.} and Chichkov, {B. N.} and Kivshar{\textquoteright}, {Yu S.} and Belov, {P. A.}",

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year = "2014",

doi = "10.1134/S1063783414110262",

language = "English",

volume = "56",

pages = "2166--2172",

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T1 - Two modes of laser lithography fabrication of three-dimensional submicrometer structures

AU - Shishkin, I. I.

AU - Samusev, K. B.

AU - Rybin, M. V.

AU - Limonov, M. F.

AU - Kiyan, R. V.

AU - Chichkov, B. N.

AU - Kivshar’, Yu S.

AU - Belov, P. A.

PY - 2014

Y1 - 2014

N2 - The modes of laser lithography fabrication of three-dimensional submicrometer structures have been studied. The method is based on the effect of threshold two-photon polymerization of a photosensitive material at the laser beam focus. To determine the lithograph workspace in the coordinates “laser power-speed of the sample displacement with respect to the laser focus,” a series of photonic crystals with the woodpile structure is prepared. Two methods for fabricating three-dimensional structures, i.e., raster scanning and vector graphics (or the vector method) are analyzed in detail. The advantages of the vector method for fabricating periodic structures are demonstrated using crystals of inverted yablonovite as an example. The prepared samples are studied by scanning electron microscopy.

AB - The modes of laser lithography fabrication of three-dimensional submicrometer structures have been studied. The method is based on the effect of threshold two-photon polymerization of a photosensitive material at the laser beam focus. To determine the lithograph workspace in the coordinates “laser power-speed of the sample displacement with respect to the laser focus,” a series of photonic crystals with the woodpile structure is prepared. Two methods for fabricating three-dimensional structures, i.e., raster scanning and vector graphics (or the vector method) are analyzed in detail. The advantages of the vector method for fabricating periodic structures are demonstrated using crystals of inverted yablonovite as an example. The prepared samples are studied by scanning electron microscopy.

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DO - 10.1134/S1063783414110262

M3 - Article

SN - 1063-7834

VL - 56

SP - 2166

EP - 2172

JO - Physics of the Solid State

JF - Physics of the Solid State

IS - 11

ER -

Two modes of laser lithography fabrication of three-dimensional submicrometer structures

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