Ultrafast ablation with high-pulse-rate lasers. Part I: Theoretical considerations

E. G. Gamaly*, A. V. Rode, B. Luther-Davies

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    196 Citations (Scopus)

    Abstract

    A novel ultrafast pulsed laser deposition (PLD) which eliminates film contamination was developed. Cluster or droplet contamination from the laser plumes are removed due to the low number of atoms evaporated per laser pulse. Furthermore, the nanosecond pulse duration transition to picosecond pulse duration increases the evaporation rate. The efficiency of the system is tested on the growth of amorphous carbon thin films.

    Original languageEnglish
    Pages (from-to)4213-4221
    Number of pages9
    JournalJournal of Applied Physics
    Volume85
    Issue number8 I
    DOIs
    Publication statusPublished - 15 Apr 1999

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