Ultrafast ablation with high-pulse-rate lasers. Part II: Experiments on laser deposition of amorphous carbon films

A. V. Rode; B. Luther-Davies; E. G. Gamaly

doi:10.1063/1.370334

Ultrafast ablation with high-pulse-rate lasers. Part II: Experiments on laser deposition of amorphous carbon films

A. V. Rode^*, B. Luther-Davies, E. G. Gamaly

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

127 Citations (Scopus)

Abstract

Amorphous carbon films were grown using ultrafast pulsed laser deposition from Q-switched and mode-locked Nd:YAG lasers. High repetition rate laser ablation resulted into very high film deposition rates on the graphite targets. The ultrafast laser ablation gave amorphous films of high surface quality and of excellent thickness uniformity.

Original language	English
Pages (from-to)	4222-4230
Number of pages	9
Journal	Journal of Applied Physics
Volume	85
Issue number	8 I
DOIs	https://doi.org/10.1063/1.370334
Publication status	Published - 15 Apr 1999

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title = "Ultrafast ablation with high-pulse-rate lasers. Part II: Experiments on laser deposition of amorphous carbon films",

abstract = "Amorphous carbon films were grown using ultrafast pulsed laser deposition from Q-switched and mode-locked Nd:YAG lasers. High repetition rate laser ablation resulted into very high film deposition rates on the graphite targets. The ultrafast laser ablation gave amorphous films of high surface quality and of excellent thickness uniformity.",

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AB - Amorphous carbon films were grown using ultrafast pulsed laser deposition from Q-switched and mode-locked Nd:YAG lasers. High repetition rate laser ablation resulted into very high film deposition rates on the graphite targets. The ultrafast laser ablation gave amorphous films of high surface quality and of excellent thickness uniformity.

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JO - Journal of Applied Physics

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IS - 8 I

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Ultrafast ablation with high-pulse-rate lasers. Part II: Experiments on laser deposition of amorphous carbon films

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