Unveiling the differences between dynamic and static deposition of PECVD silicon nitride for solar cells

Saul Winderbaum, Andres Cuevas, Jason Tan, Rebecca Dunn, Peter Pohl, Jan Schmidt, Jian-Long Han, Kristin Roth

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper

Original language	English
Title of host publication	Proceedings of the 20th European Photovoltaic Solar Energy Conference
Editors	W Palz, H Ossenbrink, P Helm
Place of Publication	Munich, Germany
Publisher	WIP-Renewable Energies
Pages	1301-1304
ISBN (Print)	3936338191
Publication status	Published - 2005
Event	European Photovoltaic Solar Energy Conference 2005 - Barcelona Spain Duration: 1 Jan 2005 → … http://www.wip-munich.de

Conference	European Photovoltaic Solar Energy Conference 2005
Period	1/01/05 → …
Other	June 6 2005
Internet address	http://www.wip-munich.de

Cite this

@inproceedings{c29e8799306a4ae9977fbddee92fbc42,

title = "Unveiling the differences between dynamic and static deposition of PECVD silicon nitride for solar cells",

author = "Saul Winderbaum and Andres Cuevas and Jason Tan and Rebecca Dunn and Peter Pohl and Jan Schmidt and Jian-Long Han and Kristin Roth",

year = "2005",

language = "English",

isbn = "3936338191",

pages = "1301--1304",

editor = "{W Palz, H Ossenbrink, P Helm}",

booktitle = "Proceedings of the 20th European Photovoltaic Solar Energy Conference",

publisher = "WIP-Renewable Energies",

note = "European Photovoltaic Solar Energy Conference 2005 ; Conference date: 01-01-2005",

url = "http://www.wip-munich.de",

}

Winderbaum, S, Cuevas, A, Tan, J, Dunn, R, Pohl, P, Schmidt, J, Han, J-L & Roth, K 2005, Unveiling the differences between dynamic and static deposition of PECVD silicon nitride for solar cells. in WPHOPH (ed.), Proceedings of the 20th European Photovoltaic Solar Energy Conference. WIP-Renewable Energies, Munich, Germany, pp. 1301-1304, European Photovoltaic Solar Energy Conference 2005, 1/01/05.

Unveiling the differences between dynamic and static deposition of PECVD silicon nitride for solar cells. / Winderbaum, Saul; Cuevas, Andres; Tan, Jason et al.
Proceedings of the 20th European Photovoltaic Solar Energy Conference. ed. / W Palz, H Ossenbrink, P Helm. Munich, Germany: WIP-Renewable Energies, 2005. p. 1301-1304.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper

TY - GEN

T1 - Unveiling the differences between dynamic and static deposition of PECVD silicon nitride for solar cells

AU - Winderbaum, Saul

AU - Cuevas, Andres

AU - Tan, Jason

AU - Dunn, Rebecca

AU - Pohl, Peter

AU - Schmidt, Jan

AU - Han, Jian-Long

AU - Roth, Kristin

PY - 2005

Y1 - 2005

M3 - Conference Paper

SN - 3936338191

SP - 1301

EP - 1304

BT - Proceedings of the 20th European Photovoltaic Solar Energy Conference

A2 - null, W Palz, H Ossenbrink, P Helm

PB - WIP-Renewable Energies

CY - Munich, Germany

T2 - European Photovoltaic Solar Energy Conference 2005

Y2 - 1 January 2005

ER -