Vertically-coupled micro-ring resonator in hydrogenated amorphous silicon

Duk Yong Choi; Xin Gai; Barry Luther-Davies; Jun Cheng

doi:10.1364/cleo_si.2016.sf2p.4

Vertically-coupled micro-ring resonator in hydrogenated amorphous silicon

Duk Yong Choi, Xin Gai, Barry Luther-Davies, Jun Cheng

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

We demonstrated vertically coupled, hydrogenated amorphous silicon ring resonators by leveraging low temperature deposition of the material where SU-8 polymer was employed as planarization layer and resonator gap material.

Original language	English
Title of host publication	2016 Conference on Lasers and Electro-Optics, CLEO 2016
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781943580118
DOIs	https://doi.org/10.1364/cleo_si.2016.sf2p.4
Publication status	Published - 16 Dec 2016
Event	2016 Conference on Lasers and Electro-Optics, CLEO 2016 - San Jose, United States Duration: 5 Jun 2016 → 10 Jun 2016

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Name	2016 Conference on Lasers and Electro-Optics, CLEO 2016

Conference

Conference	2016 Conference on Lasers and Electro-Optics, CLEO 2016
Country/Territory	United States
City	San Jose
Period	5/06/16 → 10/06/16

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title = "Vertically-coupled micro-ring resonator in hydrogenated amorphous silicon",

abstract = "We demonstrated vertically coupled, hydrogenated amorphous silicon ring resonators by leveraging low temperature deposition of the material where SU-8 polymer was employed as planarization layer and resonator gap material.",

author = "Choi, {Duk Yong} and Xin Gai and Barry Luther-Davies and Jun Cheng",

note = "Publisher Copyright: {\textcopyright} 2016 OSA.; 2016 Conference on Lasers and Electro-Optics, CLEO 2016 ; Conference date: 05-06-2016 Through 10-06-2016",

year = "2016",

month = dec,

day = "16",

doi = "10.1364/cleo_si.2016.sf2p.4",

language = "English",

series = "2016 Conference on Lasers and Electro-Optics, CLEO 2016",

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Choi, DY, Gai, X, Luther-Davies, B & Cheng, J 2016, Vertically-coupled micro-ring resonator in hydrogenated amorphous silicon. in 2016 Conference on Lasers and Electro-Optics, CLEO 2016., 7788516, 2016 Conference on Lasers and Electro-Optics, CLEO 2016, Institute of Electrical and Electronics Engineers Inc., 2016 Conference on Lasers and Electro-Optics, CLEO 2016, San Jose, United States, 5/06/16. https://doi.org/10.1364/cleo_si.2016.sf2p.4

Vertically-coupled micro-ring resonator in hydrogenated amorphous silicon. / Choi, Duk Yong; Gai, Xin; Luther-Davies, Barry et al.
2016 Conference on Lasers and Electro-Optics, CLEO 2016. Institute of Electrical and Electronics Engineers Inc., 2016. 7788516 (2016 Conference on Lasers and Electro-Optics, CLEO 2016).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Vertically-coupled micro-ring resonator in hydrogenated amorphous silicon

AU - Choi, Duk Yong

AU - Gai, Xin

AU - Luther-Davies, Barry

AU - Cheng, Jun

PY - 2016/12/16

Y1 - 2016/12/16

N2 - We demonstrated vertically coupled, hydrogenated amorphous silicon ring resonators by leveraging low temperature deposition of the material where SU-8 polymer was employed as planarization layer and resonator gap material.

AB - We demonstrated vertically coupled, hydrogenated amorphous silicon ring resonators by leveraging low temperature deposition of the material where SU-8 polymer was employed as planarization layer and resonator gap material.

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U2 - 10.1364/cleo_si.2016.sf2p.4

DO - 10.1364/cleo_si.2016.sf2p.4

M3 - Conference contribution

T3 - 2016 Conference on Lasers and Electro-Optics, CLEO 2016

BT - 2016 Conference on Lasers and Electro-Optics, CLEO 2016

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2016 Conference on Lasers and Electro-Optics, CLEO 2016

Y2 - 5 June 2016 through 10 June 2016

ER -

Vertically-coupled micro-ring resonator in hydrogenated amorphous silicon

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