Wafer-level flame-spray-pyrolysis deposition of gas-sensitive layers on microsensors

S. Kühne*, M. Graf, A. Tricoli, F. Mayer, S. E. Pratsinis, A. Hierlemann

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

45 Citations (Scopus)

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Material Science

Engineering