@inproceedings{acb1029902334091bcad22b8a07548d5,
title = "Wafer-Scale Functional Metasurfaces on Free-Standing Membranes",
abstract = "We demonstrate free-standing metasurfaces made by a new wafer-scale and CMOS compatible nanofabrication method and produce nanostructures over large-area transparent oxide membranes. Applications include narrow-band spectral filtering, efficient light focusing, polarization control and optofluidic biosensors.",
author = "Tseng, {Ming Lun} and Aleksandrs Leitis and Aurelian John-Herpin and Kivshar, {Yuri S.} and Hatice Altug",
note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2022, {\textcopyright} 2022 The Author(s); 2022 Conference on Lasers and Electro-Optics, CLEO 2022 ; Conference date: 15-05-2022 Through 20-05-2022",
year = "2022",
language = "English",
series = "2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings",
address = "United States",
}